Charging of a Structured Material during Electron Beam Exposure

Electron Energy Dependent Charging Effects of Multilayered Dielectric Material

Measurements of the charge distribution in electron-bombarded, thin-film, multilayer dielectric samples showed that charging of multilayered materials evolves with time and is highly dependent on incident energy; this is driven by electron penetration depth, electron emission and material conductivity. Based on the net surface potential’s dependence on beam current, electron range, electron emi...

Independent-exposure Method in Electron-beam Lithography

Physical characteristics of electron beam from conventional and beam shaper IOERT applicator: A comparison study

Introduction: Intraoperative electron radiation therapy (IOERT) is one of the cancer treatment techniques that delivers high doses to tumor bed during surgery. IOERT can be performed by either conventional LINACs or dedicated IORT accelerators such as LIAC (Light Intraoperative Accelerator). Two types of applicators can be used with LIAC dedicated accelerator including conventi...

Fast simulation of stochastic exposure distribution in electron-beam lithography

The relative critical dimension variation of nanoscale features has become large enough to significantly affect the minimum feature size and maximum circuit density realizable in most lithographic processes. One source of such variation is the line edge roughness (LER). In the electron-beam lithographic process, the fluctuation of exposure (energy deposited) in the resist is one of the main fac...

Measurements of Photon Beam Flattening Filter Using an Anisotropic Analytical Algorithm and Electron Beam Employing Electron Monte Carlo

  Introduction: This study aimed to report the measurement of photon and electron beams to configure the Analytical Anisotropic Algorithm and Electron Monte Carlo used in clinical treatment. Material and Methods: All measurements were performed in a large water phantom using a 3-dimensional scanning system (PTW, Germany). ...